空气净化工程的浮游微粒子浓度，使用高性能的过滤器即可容易达到零水平，实际的生产现场由于作业者、机器、周边机械的发尘及基板运送时所接触的零件材料的发尘等，在制造品周边扬起了少许的微粒子，因而造成了元件清洁面的粒子污染。

 

Air purification engineering of planktonic particles concentration, using high performance filter can be easily reached the zero level, actual production site due to the operator and machine, peripheral machinery of dust and substrate transport the contact parts of the material dust etc., in manufacturing goods surrounding raised a little particles, resulting in the components clean surface particle pollution.

 

空气净化工程 http://www.jnjkjh.com/ 该如何防止微粒子污染呢？应遵守下列四项基本原则：

 

How to prevent the pollution of particulate? The following four basic principles should be followed:

 

1） 不携入

 

1) not to bring in

 

在无尘室内不携入微粒子的方法有：

 

In the clean room and do not carry particles with details:

 

作业员进入无尘室前，机台、零件携入前应进行清洁处理；

 

Before entering the clean room, the operator should be cleaned with the machine and the parts before entering the clean room;

 

进入无尘室者在更衣室要穿着不发尘、不产生静电的具特殊导电性纤维材质的无尘服、帽、鞋、手套、口罩等。

 

Into the clean room in the dressing room to wear no hair, no static electricity with a special conductive fiber material of clean clothes, caps, shoes, gloves, masks, etc..

 

通过风淋室时利用高速干净空气除去附在衣服表面的粒子后，才能进入无尘室。

 

Through the air shower room, the use of high speed clean air to remove the particles attached to the surface of the clothes, in order to enter the clean room.

 

机器及材料带进无尘室前，应尽可能在密封状态下带进无尘室前室保养后用超纯水擦拭，经风淋室吹淋后才进入无尘室。

 

In front of the machine and material into the clean room, should as far as possible in a sealed condition in the maintenance of the clean room antechamber with ultrapure water wipe, after the air shower room shower before entering the clean room.

 

无尘室中须全程穿戴密闭式安全帽及佩戴附有filter的排气用小型fan于腰间。

 

With a small fan in the waist to wear full exhaust closed type safety cap and worn with a filter of the clean room.

 

2） 不发生

 

2) no

 

在控制最大污染源--人在无尘室内的微粒子发尘量的同时，也应控制第二大污染源—制造机台的发尘量。因物品在移动时，所产生的摩擦及接触剥离会造成发尘，而物品在移动时也会有微粒子的发生。故为了控制空气净化工程发尘量达到最小限度应采取以下对策：

 

In control of the largest pollution source - the dust in the dust of the dust particles in the dust chamber, it should control the second pollution sources - making machine dust. Because of the movement of goods, the resulting friction and contact stripping can cause hair dust, while the goods will have the occurrence of particles in the movement. Therefore, in order to control the air purification project dust quantity to reach the minimum should take the following measures:

 

减少接触剥离发尘的动作形态；

 

Reduction of the action form of contact stripping hair;

 

采用磨耗发尘小的材质；

 

The material used in the wear hair dust;

 

采用发尘小的润滑油；

 

Use small lubricating oil;

 

机台应用空压浮上的非接触化工作原理。

 

Principle of non - contact operation of air pressure floating on the machine.

 

3） 不储备

 

3) No Reserve

 

若能彻底实施“不携入”技术，空气净化工程的洁净度就可以维持。但现实中人和物品的频繁出入及制造机台的掣动，在广大的无尘室内要有完全洁净度是不可能的。因此“不储备”技术快速地在过滤器中应用以除去已发生的微粒子变得非常重要。通常已发生的微粒子会依据重力及静电吸附力而停留在周边的物体表面。突发性的振动及不稳定的气流会使这些累积微粒在空气中再度扬起，增加了重大微粒子污染的危险性。

 

If the implementation of the "no" technology, air purification project can be maintained clean. But reality of people and goods was frequent and manufacturing machine button, in the majority of the clean room to have completely cleanliness is not possible. Therefore, the "non - reserve" technique is applied to the filter to remove the particles that have been taken place very important. Usually the particles that have been taken will remain in the vicinity of the object surface by gravity and electrostatic forces. The sudden vibration and unstable air flow can cause the accumulation of particles to be raised again in the air, and increase the risk of contamination of the major particles.

 

在最高等级的无尘室中从天花板到地面，完全除去微粒子的空气须在0.3-0.4m/s的速度作垂直向下流动。这是在约10秒内将室内空气和完全过滤空气完全交换所计算出来的数值。同时，空气的流向也必须要有精确的控制才行。特别要保证气流的流通路径畅通无阻，因为在流通路径中有障碍物的话，容易产生空气空气涡流而形成空气的滞留区域，使得附近已发生的微粒子无法快速排除而长时间漂流在无尘室内，而一部分会附着在周边机器设备的表面而引起污染。

 

From the ceiling to the ground in the highest level of the clean room, the air to completely remove the particles from the ceiling is required to be vertically downward at the speed of 0.3-0.4m/s. This is calculated by the full exchange of the indoor air and the fully filtered air in about 10 seconds. At the same time, the flow of air must have a precise control. Especially to ensure the smooth flow of the flow path, because there are obstacles in the flow path, easy to produce air vortex and the formation of air stagnation zones, making near has occurred particles cannot quickly ruled out long time drifting in the clean room, and a branch of attachment in the peripheral equipment of surface caused by pollution.

 

控制气流可防止微粒子累积，但对于带电表面的微粒累积就无法防止。为了防止由静电吸附而引起的微粒附着，通常在无尘室内会使用带电程度在数十伏以下的导电性材料。而对于制造品本身的带电，则采用带电程度很少的搬送形态及接触部品材料，并藉由除电装置进行除电。

 

Control air flow can prevent the accumulation of particles, but can not prevent the accumulation of particles on the charged surface. In order to prevent the particles attached to the particles by electrostatic adsorption, it is usually used in the clean room to use the electrical conductivity of the electricity in the following several decades. And for the manufacture of the product itself, the use of electricity to carry out the form and the contact of the material, and by the electric device.

 

4） 排除/除去

 

4) exclusion / removal

 

在无法避免大量微粒子发生的机台中，为了不让无尘室内产生微粒子，因此直接做对外排气的动作，即所谓的局部排气。针对排气的对策如下：由于导入同量的外气是必要的，但会伴随大量的能源消耗。所以无法说是绝对理想的对策。因此尽可能地在压缩排气量的同时，不仅仅是向无尘室外排气，而应采用将除去粒子后的空气再回流到无尘室内之对策。

 

In order to prevent the occurrence of a large number of particles in the machine, in order not to produce particles, so directly do the external exhaust, the so-called local exhaust. The countermeasures are as follows: the introduction of exhaust gas amount is necessary, but will be accompanied by a large amount of energy consumption. So can not say that is absolutely ideal strategy. Therefore, as far as possible in the compression of the exhaust volume, not only to clean out the air, and should be used to remove the air and then return to the dust chamber of the countermeasures.