1．器件工艺良品率

 

1 device process yield

 

在一个污染环境中制成的器件会引起多种问题。污染会改变器件的尺寸，改变表面的洁净度，并且/或者造成有凹痕的表面。在洁净厂房设计施工 http://www.jnjkjh.com/ 的过程中，有一系列的质量检验和检测，他们是为检测出被污染的晶片而特殊设计的。高度的污染使得仅有少量的晶片能够完成全工艺过程，从而导致成本升高。

 

Devices made in a polluted environment can cause many problems. Pollution can change the size of the device, change the cleanliness of the surface, and / or surface caused by a dent. In the process of the design and construction of a clean house, there is a series of quality inspection and testing, they are specially designed for the detection of contaminated wafers. The high degree of pollution makes only a small number of wafers can complete the whole process, which leads to higher cost.

 

2．器件性能

 

2 device performance

 

一个更为严重的问题是在工艺过程中漏检的小的污染。晶片看起来是干净的，但其中的未能检测出来的颗粒、不需要的化学物质和高浓度的可移动离子污染物，可能会改变器件的电性能。这个问题通常是在芯片切割时的电测试中显现出来。

 

A more serious problem is missing in the process of small pollution. The chip appears to be clean, but the failure to detect the particles, do not require the chemical substances and high concentrations of the mobile ion contaminants may change the electrical properties of the device. This problem is usually shown in the electrical tests when the chip is cut.

 

3．器件可靠性

 

3 device reliability

 

最令人担心的莫过于污染对器件可靠性的失效影响。小剂量的污染物可能会在工艺过程中进入晶片，而未被通常的器件测试检验出来。然而，这些污染物会在器件内部移动，最终停留在电性敏感区域，从而引起器件失效。这一失效模式逐渐成为高科技行业关注的目标。

 

The most worrying is that the failure of the reliability of the device is affected by pollution. A small dose of contaminants may be in the process of the process, and the test of the device is not usually tested. However, these pollutants will move in the device, and eventually stay in the sensitive area of the device, which can cause the device failure. The failure mode has gradually become the focus of the high-tech industry.