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空气净化工程相关静电测试方法

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发布日期:2017-04-13 17:37:16

空气净化工程内往往存在着不容忽视的静电危害,是导致电子元件、电子仪器和设备损坏或性能下降的重要因素之一,对芯片制造的影响尤为严重,此外,静电还是空气净化工程在生产过程中易燃易爆气体或粉尘产生时,导致爆炸、火灾的元凶以及存在电击伤人的隐患。静电对尘埃的吸附效应,也易造成生产环境和产品各个壁面的尘埃聚集,以致影响空气净化工程的环境和产品污染。

Air purification engineering is often the existence of electrostatic hazards can not be ignored, is one of the important factors that lead to the decline of the electronic components, electronic instruments and equipment damage or performance, impact of the chip manufacturing is particularly serious. In addition, electrostatic and air purification engineering in the production process of flammable and explosive gas or dust generation, resulting in explosion, fire the culprit and the existence of hidden danger of electric shock injuries. The adsorption effect of electrostatic on the dust, it also easily lead to the production of environmental and product of the dust accumulation, resulting in the impact of air purification engineering environment and product pollution.

1.相关的规范规定

1 related specification

空气净化工程 http://www.jnjkjh.com/ 相关规范对静电防护问题,从设计到运行都有具体的规定。例如,设施应该选用既不会产生也不能蓄积大量静电的建筑材料。为保护对静电敏感的设备、器件、地面,电阻应该在104~107Ω范围内,表面聚集电荷的限定值应小于2KV等等。

Air purification engineering related specifications for electrostatic protection, from design to operation have specific provisions. For example, facilities should be used to produce a large amount of static electricity. In order to protect the device, the device and the ground, the resistance should be in the range of 104~107, the limiting value of the surface charge is less than 2KV, etc..

国家标准GB 50073--2001《洁净厂房设计规范》规定:洁净室地面层应具有导电性能并应保持长时间稳定。洁净室地面表层应采用静电耗散性材料,其表面电阻应为1.0×105~1.0×1012Ω或体积电阻率为1.0×104~1.0×1011Ω·com。洁净室地面应设有导电泄放措施和接地结构,其对地泄放电阻应为1.0×105~1.0×109Ω等等。

National standard 50073--2001 GB "design code for the clean house design" provides that the ground floor of the clean room should have a conductive property and should be kept stable for a long time. The surface layer of the clean room should be used for static dissipative material, the surface resistance should be 1 * 105~1.0 * 1012 or the volume resistivity is 1 * 104~1.0 * 1011 * com. The ground floor of the clean room shall be provided with an electric discharge measure and a grounding structure, which shall be 1 x 105~1.0 x 109 and so on.

2.静电测试方法

2 static test method

静电测试通常包括两部分内容,一是静电测试本身,其目的是掌握产品表面上的静电电荷和地面、工作台面或其他设施的静电电压的耗散率;二是离子生成器测试,其目的是通过监测器测量初始充电的放电时间和通过测定隔开来的监测板的补偿电压来评估其性能。上述两部分测量结果都能反映清除或中和静电荷的效率和产生的正负离子量间的不稳定性 。

Static test usually includes two parts, one static test itself, its purpose is master products on the surface of the electrostatic charge and on the ground, table or other facilities of the electrostatic voltage of the dissipation rate; ion generator test, its purpose is through monitors to measure initial charge discharge time and the compensation voltage for the determination of separated from the monitoring board to evaluate its performance. These two parts can reflect the efficiency of the removal or neutralization of the static charge and the instability of the positive and negative ions generated by the production.