在空气净化工程中，除了控制颗粒，空气中温度，湿度和烟雾的含量也需要规定与控制。

 

In the air purification project, in addition to control particles, air temperature, humidity and smoke content also need to be specified and controlled.

 

温度控制对操作员的舒适性与工艺控制是很重要的。许多利用化学溶剂来做刻蚀与清洗的工艺都在没有温度控制的设备箱内完成，只依赖于空气净化工程 http://www.jnjkjh.com/ 温度的控制。这种控制非常重要，因为化学反应会随温度的变化而不同，例如，每升高十摄氏度，刻蚀速率参数加二。通常的室温为72华氏度，上下幅度两度。

 

Temperature control is very important for operator comfort and process control. Many chemical solvents are used to do the etching and cleaning of the equipment in the absence of temperature control, and only rely on the control of the temperature of the air purification project. This control is very important, because the chemical reaction with the temperature changes, for example, every ten degrees Celsius, the etching rate parameters plus two. The usual room temperature is 72 degrees F, and the upper and lower ranges are twice.

 

相对湿度也是一个非常重要的工艺参数，尤其在光刻工艺中。在这个工艺中，要在晶片表面镀上一层聚合物作为刻蚀膜版。如果湿度过大，晶圆表面太潮湿，会影响聚合物的结合，就象在潮湿的画板上绘画一样。如果湿度过低，晶圆表面就会产生静电，这些静电会从空气中吸附微粒。一般相对湿度应保持在15%到50%之间。

 

Relative humidity is also a very important process parameter, especially in the process of lithography. In this process, a layer of polymer is coated on the surface of the wafer as an etch film. If the humidity is too large, the surface of the wafer is too wet, will affect the polymer combination, like painting in the wet canvas like. If the humidity is too low, the surface of the wafer will produce static electricity, which will be absorbed from the air. General relative humidity should be maintained between 15% to 50%.

 

烟雾是空气净化工程的另一个空中污染源。而它同样对光刻工艺影响最大。光刻中的一个步骤与照相中的曝光相似，是一种化学反应工艺。臭氧是烟雾中的主要成分，易影响曝光，必须被控制。在进入空气的管道中装上碳素过滤器可吸附臭氧。

 

Smoke is another air pollution source in the air purification project. And it is also the biggest influence on the lithography process. One step in the process is similar to that of a photograph, a chemical reaction process. Ozone is a major component of smog, which is easily affected by exposure and must be controlled. In the pipeline into the air filled with the carbon filter adsorption ozone.